Lithography · Resources

Photohead data sheets

Download the data sheet for any photohead in the LUXBEAM® Lithography System. If you are weighing two heads, tell us the resist, panel and line / space. We’ll tell you your best match.

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Data sheets

Every photohead, fully documented

Download the full technical specification for any LUXBEAM photohead as a PDF: imaging performance, dimensions and integration data in one document, always up to date.

8 documents

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Not sure which head?

Let us know the substrate, target line/space, and format, and we’ll get back to you shortly with a recommended photohead.

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