Resources
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Brochures, data sheets, videos and certificates for every LUXBEAM® system, in one place. Filter by area to see what applies to your process.
Brochures

LUXBEAM® Lithography System – LLS Series
Subsystems series for PCB lithography and Advanced Packaging applications. Maximum flexibility for stable, high-yield manufacturing on the nanometer scale. Maximize throughput without compromising accuracy or line/width tolerances.
Data sheets
BEAM30 — Technical Data Sheet
Specifications, dimensions and performance data for BEAM30.Download PDF (127 KB)LLS02 — Technical Data Sheet
Specifications, dimensions and performance data for LLS02.Download PDF (134 KB)LLS03 — Technical Data Sheet
Specifications, dimensions and performance data for LLS03.Download PDF (130 KB)LLS05 — Technical Data Sheet
Specifications, dimensions and performance data for LLS05.Download PDF (122 KB)LLS06 — Technical Data Sheet
Specifications, dimensions and performance data for LLS06.Download PDF (133 KB)LLS1000 — Technical Data Sheet
Specifications, dimensions and performance data for LLS1000.Download PDF (824 KB)LLS15 — Technical Data Sheet
Specifications, dimensions and performance data for LLS15.Download PDF (129 KB)LLS30 — Technical Data Sheet
Specifications, dimensions and performance data for LLS30.Download PDF (124 KB)
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